ASE-2316 Introduction to Microsystem Technology, 5 cr

Person responsible

Mariaana Savia, Pasi Kallio

Lessons

Learning Outcomes

After the course, the student is able to: - define microsystem technology and name its main applications - identify different microscopy techniques, explain their working principles and name the benefits and drawbacks - define scaling effect, knows its consequences and how analyse its influences on different phenomena - name the most important microfabrication methods and know their strengths and limitations - name capabilities and state-of-the-art of selected microsensors, explain their working principles and name their benefits and drawbacks - name capabilities and state-of-the-art of microactuators, explain their working principles and name their benefits and drawbacks

Study material

Correspondence of content