BMT-2316 Introduction to Microsystem Technology, 5 cr
Vastuuhenkilö
Pasi Kallio
Opetus
| Toteutuskerta | Periodi | Vastuuhenkilö | Suoritusvaatimukset |
| BMT-2316 2018-01 | 1 - 2 |
Pasi Kallio Mariaana Savia |
Passing the final exam, exercises and seminar work (including an oral presentation/slides). |
Osaamistavoitteet
After the course, the student is able to: - define microsystem technology and name its main applications - identify different microscopy techniques, explain their working principles and name the benefits and drawbacks - define scaling effect, knows its consequences and how analyse its influences on different phenomena - name the most important microfabrication methods and know their strengths and limitations - name capabilities and state-of-the-art of selected microsensors, explain their working principles and name their benefits and drawbacks - name capabilities and state-of-the-art of microactuators, explain their working principles and name their benefits and drawbacks
Sisältö
| Sisältö | Ydinsisältö | Täydentävä tietämys | Erityistietämys |
| 1. | Definition of microsystem technology, understanding of the potential and challenges related to microsystem technology, ability to name the main applications. | ||
| 2. | Definition of scaling effect, its origin and main effects at microscale. | Basic understanding of dimensional analysis and and its utilization in microsystem technology. | Analyse and compare the differencies in scaling between different physical phenomena. |
| 3. | Microscopy, especially optical microscopy, scanning electron microscopy and atomic force microscopy, basic operating principles. | Comparing benefits and limitations of different microscopy methods. | Selection of microscopy technique according to the application. |
| 4. | Skills to operate in the clean room facilities under supervision. | Profilometers in characterization. | Other characterization methods. |
| 5. | Microactuators, especially piezoelectric actuators, shape memory alloy actuators, thermal actuators and electrostatic actuators, basic operating principles. | Comparing the implementation and performance of different actuator types. | Material-related phenomena of microactuators. Microrobotics as an application field of microactuators. |
| 6. | Microsensors, especially pressure, acceleration and flow sensors. Structure and basic operation principles. | Comparing the implementation and performance of different sensor types. | Sensor fabrication techniques. |
Ohjeita opiskelijalle osaamisen tasojen saavuttamiseksi
The grade of the course is determined by examination and seminar work. If the student knows the core material well, there is a possibility to pass the course with grade 3. The supplementing knowledge must be also known in order to reach a grade of 4 or 5. If in the core material there are minor shortcomings, the student will have an opportunity for the grade 1 or 2 depending on the amount of the shortcomings. If there are considerable shortcomings in the knowledge of the core material, the student will not pass the course.
Arvosteluasteikko:
Numerical evaluation scale (0-5)
Oppimateriaali
| Tyyppi | Nimi | Tekijä | ISBN | URL | Lisätiedot | Tenttimateriaali |
| Lecture slides | Lecture slides | Lecturers | Yes | |||
| Summary of lectures | Introduction to Microsystem Technology | Pasi Kallio et al | Yes |
Vastaavuudet
| Opintojakso | Vastaa opintojaksoa | Selite |
| BMT-2316 Introduction to Microsystem Technology, 5 cr | ASE-2316 Introduction to Microsystem Technology, 5 cr |