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ACI-51006 JOHDATUS MIKROSYSTEEMITEKNIIKKAAN, 4 cr
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Person responsible
Pasi Kallio
Lecturers
Pasi Kallio, Senior Research Engineer, SD104
Johana Kuncova-Kallio, Research Engineer, SD108
Mariaana Savia, Research Engineer, SD201
Pekka Ronkanen, Research Engineer, SD108
Ari Hakala, Research Engineer, SD103
Lecture room and time
Per I,II,III: Wednesday 14 - 16, SD302 (Au)
Implementation rounds
Implementation 1
| Period 1 | Period 2 | Period 3 | Period 4 | Period 5 | Summer | Language of instruction | |
| Lecture | 2 h/week+ | 2 h/week | - | - | - | - | In English only |
| Seminar | - | - | 2 h/week | - | - | - | In English only |
| Exam | In English only | ||||||
Objectives
The objective of the course is to give an overview of microsystem technology and its applications. After the course, a student should be aware of the capabilities and state-of-the-art of MEMS and microsystem technology. The course suits especially well for students who aim for R&D tasks.
Contents
| Content | Core content | Complementary knowledge | Specialist knowledge |
| 1. | Microfabrication: silicon micromachining, LIGA, bonding techniques | Microinjection molding, soft lithography, other microfabrication techniques (lase micromachining, micro electro-discharge machining,etc) | |
| 2. | Scaling effect: basics of scaling, consequences in microrobotics and microfluidics, Trimmer's notation | details of the forces dominant in the microscale | |
| 3. | Microsensors: pressure microsensors, microaccelerometers, micro gyrometers, chemical microsensors | Magnetic microsensors | Electric interfacing |
| 4. | Microactuators: piezoelectric actuators, shape memory materials, electrostatic actuators, performance measures of actuators | magnetic micro and miniactuators, rheologic actuators | |
| 5. | Applications: overview of application possibilties, microfluidics, microrobotics | Application examples |
Requirements for completing the course
Final examination and a seminar work (including an oral presentation and a written report).
Assessment criteria
Examination 75 %; written part of the seminar work 25%.
Study material
| Type | Name | Author | ISBN | URL, edition, availablitity... | Exam material | Language |
| Summary of lectures | Introduction to Microsystem Technology | Pasi Kallio | Monistettavissa kurssin aikana | Yes | English | |
| Lecture slides | Lecture slides on microsystems | Lecturers | Ladattavissa kurssin kotisivuilta kurssin aikana | Yes | English |
Additional information related to prequisites
No prerequisities. But the student is assumed to have willingness to cross engineering disciplines. As an introductory course, the course suits well for students having different backgrounds: automation, electrical, mechanical and environmental engineering, materials and computer science.
Other comments
The course is recommended to be taken in the third or fourth year of studies.
Correspondence of content
76527 Introduction to Microsystem Technology
| Last modified | 29.08.2005 |
| Modified by | Pasi Kallio |