Courses persons responsible
Pasi Kallio

Lecturers
Johana Kuncova-Kallio
Pekka Ronkanen
Mariaana Savia

Implementations

Person responsible:	Pasi Kallio
Programs:	Automation Engineering

	Period 1	Period 2	Period 3	Period 4	Period 5	Summer
Lecture	2 h/week	2 h/week	-	-	-	-
Seminar	-	-	2 h/week	-	-	-
Exam

(Timetable for academic year 2006-2007)

Objectives
The objective of the course is to give an overview of microsystem technology and its applications. After the course, a student should be aware of the capabilities and state-of-the-art of MEMS and microsystem technology. The course suits especially well for students who aim for R&D tasks.

Content

Content	Core content	Complementary knowledge	Specialist knowledge
1.	Microfabrication: silicon micromachining, LIGA, bonding techniques	Microinjection molding, soft lithography, other microfabrication techniques (lase micromachining, micro electro-discharge machining,etc)
2.	Scaling effect: basics of scaling, consequences in microrobotics and microfluidics, Trimmer's notation		details of the forces dominant in the microscale
3.	Microsensors: pressure microsensors, microaccelerometers, micro gyrometers, chemical microsensors	Magnetic microsensors	Electric interfacing
4.	Microactuators: piezoelectric actuators, shape memory materials, electrostatic actuators, performance measures of actuators	magnetic micro and miniactuators, rheologic actuators
5.	Applications: overview of application possibilties, microfluidics, microrobotics	Application examples

Requirements for completing the course
Final examination and a seminar work (including an oral presentation and a written report).

Evaluation criteria for the course

Study material

Type	Name	Auhor	ISBN	URL	Edition, availability...	Exam material	Language
Summary of lectures	Introduction to Microsystem Technology	Pasi Kallio			Will be provided for copying in the beginning ofthe course.	Yes	English
Lecture slides	Lecture slides on microsystems	Lecturers			Can be dowloaded from the course web site.	Yes	English

Prerequisites
Prequisite relations (Sign up to TUT Intranet required)

Additional information about prerequisites
No prerequisities. But the student is assumed to have willingness to cross engineering disciplines. As an introductory course, the course suits well for students having different backgrounds: automation, electrical, mechanical and environmental engineering, materials and computer science.

Remarks

The course is recommended to be taken in the third or fourth year of studies.

Distance learning

- In information distribution via homepage, newsgroups or mailing lists, e.g. current issues, timetables
- In compiling teaching material, particularly for online use or other electronic media
- In compiling exercise, group or laboratory work
- In distributing and/or returning exercise work, material etc
- In the visualization of objects and phenomena, e.g. animations, demonstrations, simulations, video clips

- Contact teaching: 45 %
- Distance learning: 0 %
- Proportion of a student's independent study: 55 %

The students can gain bonus points by participating the lectures. The bonus points will be taken into account in the final grade.

In addition to the lectures, the course includes a seminar work. The phases of the seminar work are a selection of the topic, an approval of the contents of the work, a written report and an oral presentation. The topic, the contents and the written report can be delivered by email.

A final examination will be used to measure the knowledge of the students (75 % of the final grade). In addition to the examination, the written report will be evaluated (25%).

Scaling

Methods of instruction	Hours
Lectures	30
Seminar reports	50

Study materials	Hours
Introduction to MST, lecture notes	9
Online material not in finnish	2

Other scaled	Hours
New tools and study methods	5
Preparation for exam	5
Exam/midterm exam	3
Total sum	104

Correspondence of content
76527 Introduction to Microsystem Technology

Course homepage

Last modified	27.02.2006
Modified by	Johanna Heinola-Lepistö