Course Catalog 2006-2007

ACI-51006 INTRODUCTION TO MICROSYSTEM TECHNOLOGY, 4 cr
Introduction to Microsystem Technology

Courses persons responsible
Pasi Kallio

Lecturers
Johana Kuncova-Kallio
Pekka Ronkanen
Mariaana Savia

Implementations
Person responsible: Pasi Kallio
Programs: Automation Engineering
  Period 1 Period 2 Period 3 Period 4 Period 5 Summer
Lecture 2 h/week 2 h/week - - - -
Seminar - - 2 h/week - - -
Exam  
(Timetable for academic year 2006-2007)

Objectives
The objective of the course is to give an overview of microsystem technology and its applications. After the course, a student should be aware of the capabilities and state-of-the-art of MEMS and microsystem technology. The course suits especially well for students who aim for R&D tasks.

Content
Content Core content Complementary knowledge Specialist knowledge
1. Microfabrication: silicon micromachining, LIGA, bonding techniques  Microinjection molding, soft lithography, other microfabrication techniques (lase micromachining, micro electro-discharge machining,etc)    
2. Scaling effect: basics of scaling, consequences in microrobotics and microfluidics, Trimmer's notation     details of the forces dominant in the microscale 
3. Microsensors: pressure microsensors, microaccelerometers, micro gyrometers, chemical microsensors  Magnetic microsensors  Electric interfacing 
4. Microactuators: piezoelectric actuators, shape memory materials, electrostatic actuators, performance measures of actuators  magnetic micro and miniactuators, rheologic actuators    
5. Applications: overview of application possibilties, microfluidics, microrobotics  Application examples    

Requirements for completing the course
Final examination and a seminar work (including an oral presentation and a written report).

Evaluation criteria for the course

  • Examination 75 %; written part of the seminar work 25%.

  • Used assessment scale is numeric (1-5)

  • Study material
    Type Name Auhor ISBN URL Edition, availability... Exam material Language
    Summary of lectures Introduction to Microsystem Technology Pasi Kallio     Will be provided for copying in the beginning ofthe course. Yes  English 
    Lecture slides Lecture slides on microsystems Lecturers     Can be dowloaded from the course web site. Yes  English 

    Prerequisites
    Prequisite relations (Sign up to TUT Intranet required)

    Additional information about prerequisites
    No prerequisities. But the student is assumed to have willingness to cross engineering disciplines. As an introductory course, the course suits well for students having different backgrounds: automation, electrical, mechanical and environmental engineering, materials and computer science.

    Remarks

    The course is recommended to be taken in the third or fourth year of studies.

    Distance learning

  • ITC utilized during the course

  • - In information distribution via homepage, newsgroups or mailing lists, e.g. current issues, timetables
    - In compiling teaching material, particularly for online use or other electronic media
    - In compiling exercise, group or laboratory work
    - In distributing and/or returning exercise work, material etc
    - In the visualization of objects and phenomena, e.g. animations, demonstrations, simulations, video clips

  • Estimate as a percentage of the implementation of the course
  • - Contact teaching: 45 %
    - Distance learning: 0 %
    - Proportion of a student's independent study: 55 %

  • Description of the course implementation from ICT point of view
  • The students can gain bonus points by participating the lectures. The bonus points will be taken into account in the final grade.

    In addition to the lectures, the course includes a seminar work. The phases of the seminar work are a selection of the topic, an approval of the contents of the work, a written report and an oral presentation. The topic, the contents and the written report can be delivered by email.

    A final examination will be used to measure the knowledge of the students (75 % of the final grade). In addition to the examination, the written report will be evaluated (25%).

    Scaling
    Methods of instructionHours
    Lectures 30
    Seminar reports 50

    Study materials Hours
    Introduction to MST, lecture notes 9
    Online material not in finnish 2

    Other scaledHours
    New tools and study methods 5
    Preparation for exam 5
    Exam/midterm exam 3
    Total sum 104

    Correspondence of content
    76527 Introduction to Microsystem Technology

    Course homepage

    Last modified 27.02.2006
    Modified byJohanna Heinola-Lepistö