Course Catalog 2007-2008

MIT-4036 MICROSENSORS, 5 cr
Microsensors

Courses persons responsible
Jukka Lekkala

Lecturers
Jukka Lekkala

Implementations
  Period 1 Period 2 Period 3 Period 4 Period 5 Summer
Lecture 2 h/week 2 h/week - - - -
Exercise 2 h/week 1 h/week - - - -
Seminar - 1 h/week - - - -
Exam  
(Timetable for academic year 2007-2008)

Objectives
Advanced course of sensor technology introduces microsensors, their fabrication and applications.

Content
Content Core content Complementary knowledge Specialist knowledge
1. Principles and classification of sensors, different signal energies, integrated sensors, design principles of microsensors.  Physical and chemical phenomena in solid materials, origin of noise and different noise types.  Modelling software (Comsol Multiphysics) 
2. Sensor materials, sensor fabrication technologies, thin and thick film manufacturing methods, silicon processing techniques, principles of photolithography, silicon micromechanics, encapsulation of microsensors.  Lattice structure and properties of silicon, principles of the processing instruments, components of microelectronics (diode, transistor, FET).    
3. Temperature sensors, Seebeck's phenomenon in metals and semiconductors, thermistors, diode and transistor as temperature sensor, radiation sensors, photoresistor, photodiode, pyroelectric sensors, pressure sensors.
 		 Interaction of radiation with materia.    
4. Inertia sensors, acceleration sensors, gyro, flow sensors, magnetic sensors(Hall-sensor, magneto-resistive sensor), chemical sensors, ioniselective sensors, gas sensors.  Microfluidistics.    
5. Encapsulation and packaging of microsensors, applications of microsensors, examples of commercial sensors.   Packaging methods of microelectronics.    

Requirements for completing the course
Exercises/seminars and final examination.

Evaluation criteria for the course

  • Credit points earned from the examination, bonus from exercises and passed seminar specify the mark for the course.

  • Used assessment scale is numeric (1-5)

    • Study material
    Type Name Auhor ISBN URL Edition, availability... Exam material Language
    Lecture slides Microsensors Jukka Lekkala     Available as PDF documents at the homepage of the course Yes  English 
    Book Microsensors - Principles and Applications Julian W. Gardner 0 471 94135 2     Yes  English 

    Prerequisites
    Code Course Credits M/R
    MIT-4016 MIT-4016 Sensor Physics 7 Recommendable

    Prequisite relations (Sign up to TUT Intranet required)

    Remarks

  • Partial passing of course must be in connection with the same round of implementation.

  • The course is suitable for postgraduate studies.

    • Distance learning

  • ITC utilized during the course

    • - In information distribution via homepage, newsgroups or mailing lists, e.g. current issues, timetables
    - In compiling teaching material, particularly for online use or other electronic media
    - In compiling exercise, group or laboratory work
    - In distributing and/or returning exercise work, material etc

  • Estimate as a percentage of the implementation of the course

    • - Contact teaching: 75 %
    - Distance learning: 0 %
    - Proportion of a student's independent study: 25 %

    Scaling
    Methods of instructionHours
    Lectures 36
    Exercises 45
    Seminar reports 19

    Study materials Hours
    Microsensors, Gardner 15
    Lecture slides 17

    Other scaledHours
    Exam/midterm exam 3
    Total sum 135

    Principles and starting points related to the instruction and learning of the course

  • Learning is based on lectures, exercises and seminars.

    • Course homepage

    Last modified 05.03.2007
    Modified byHeikki Jokinen