Course Catalog 2008-2009 International Basic Pori International Postgraduate Open University |Degrees|     |Study blocks|     |Courses|

Course´s person responsible

Jukka Lekkala

Implementations

	Lecture times and places	Target group recommended to
Implementation 1	Per 1 : Thursday 9 - 12, SH108 Per 2 : Friday 9 - 10, SH108

Requirements

Exercises/seminars and final examination.
Completion parts must belong to the same implementation

Principles and baselines related to teaching and learning

-

Objectives

Advanced course of sensor technology introduces microsensors, their fabrication and applications.

Content

Content	Core content	Complementary knowledge	Specialist knowledge
1.	Principles and classification of sensors, different signal energies, integrated sensors, design principles of microsensors.	Physical and chemical phenomena in solid materials, origin of noise and different noise types.	Modelling software (Comsol Multiphysics)
2.	Sensor materials, sensor fabrication technologies, thin and thick film manufacturing methods, silicon processing techniques, principles of photolithography, silicon micromechanics, encapsulation of microsensors.	Lattice structure and properties of silicon, principles of the processing instruments, components of microelectronics (diode, transistor, FET).
3.	Temperature sensors, Seebeck's phenomenon in metals and semiconductors, thermistors, diode and transistor as temperature sensor, radiation sensors, photoresistor, photodiode, pyroelectric sensors, pressure sensors.	Interaction of radiation with materia.
4.	Inertia sensors, acceleration sensors, gyro, flow sensors, magnetic sensors(Hall-sensor, magneto-resistive sensor), chemical sensors, ioniselective sensors, gas sensors.	Microfluidistics.
5.	Encapsulation and packaging of microsensors, applications of microsensors, examples of commercial sensors.	Packaging methods of microelectronics.

Evaluation criteria for the course

Credit points earned from the examination, bonus from exercises and passed seminar specify the mark for the course.

Assessment scale:

Numerical evaluation scale (1-5) will be used on the course

Partial passing:

Completion parts must belong to the same implementation

Study material

Type	Name	Author	ISBN	URL	Edition, availability, ...	Examination material	Language
Book	Microsensors - Principles and Applications	Julian W. Gardner	0 471 94135 2				English
Lecture slides	Microsensors	Jukka Lekkala			Available as PDF documents at the homepage of the course		English

Prerequisites

Additional information

Will be lectured in parallel with the course MIT-4030.

More precise information per implementation

	Description	Methods of instruction	Implementation
Implementation 1	Advanced course of sensor technology introduces microsensors, their fabrication and applications.	Lectures Seminar work Excercises	Contact teaching: 0 % Distance learning: 0 % Self-directed learning: 0 %

Last modified	13.08.2008
Modifier	Heikki Jokinen