Course Catalog 2008-2009
Basic

Basic Pori International Postgraduate Open University

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Course Catalog 2008-2009

ACI-51006 Introduction to Microsystem Technology, 4 cr

Course´s person responsible

Pasi Kallio

Implementations

  Lecture times and places Target group recommended to
Implementation 1


Per 1, 2, 3 :
Wednesday 14 - 16, SD302

 
3.-n. vuosikurssi
Automaatio-, kone- ja materiaalitekniikan tiedekunta
Automaatiotekniikan koulutusohjelma
Biotekniikan koulutusohjelma
KV-opiskelijat
Sähkötekniikan koulutusohjelma
Teknis-luonnontieteellinen koulutusohjelma
Tietotekniikan koulutusohjelma
Ympäristö- ja energiatekniikan koulutusohjelma  


Requirements

Final examination and a seminar work (including an oral presentation and a written report).

Principles and baselines related to teaching and learning

-

Objectives

The objective of the course is to give an overview of microsystem technology and its applications. After the course, a student should be aware of the capabilities and state-of-the-art of MEMS and microsystem technology. The course suits especially well for students who aim for R&D tasks.

Content

Content Core content Complementary knowledge Specialist knowledge
1. Microfabrication: silicon micromachining, LIGA, bonding techniques  Microinjection molding, soft lithography, laser micromachining, micro electro-discharge machining, micro stereolithography  Packaging, interfacing, materials 
2. Scaling effect: basics of scaling, consequences in microrobotics and microfluidics, Trimmer's notation    Details of the forces dominant in the microscale 
3. Microsensors: pressure microsensors, microaccelerometers, micro gyrometers, chemical microsensors  Magnetic microsensors  Electric interfacing 
4. Microactuators and active actuator materials: piezoelectric actuators, shape memory materials, electrostatic actuators, performance measures of actuators  Magnetic microactuators, rheologic actuators  Thermomechanical microactuators, magnetic shape memory actuators, magnetic minimotors, electroactive polymers 
5. Applications: overview of application possibilities, microfluidics, microrobotics  Application examples   


Evaluation criteria for the course

Examination 75 %; written part of the seminar work 25%.

Assessment scale:

Numerical evaluation scale (1-5) will be used on the course

Study material

Type Name Author ISBN URL Edition, availability, ... Examination material Language
Lecture slides   Lecture slides on microsystems         Will be available in POP.      English  
Summary of lectures   Introduction to Microsystem Technology   Pasi Kallio       Will be provided for copying in the beginning ofthe course.      English  


Prerequisite relations (Requires logging in to POP)

Correspondence of content

Course Corresponds course  Description 
ACI-51006 Introduction to Microsystem Technology, 4 cr ACI-51000 Introduction to Microsystem Technology, 4 cr Vastaavuus 1 = 1  
ACI-51006 Introduction to Microsystem Technology, 4 cr 76527 Introduction to Microsystem Technology, 3 cu  

More precise information per implementation

  Description Methods of instruction Implementation
Implementation 1 Here you can find information concerning the implementation of the course in 2008-2009.   Lectures
Seminar work
   
Contact teaching: 0 %
Distance learning: 0 %
Self-directed learning: 0 %  


Last modified10.06.2008
ModifierPasi Kallio