Course Catalog 2008-2009 Basic Basic Pori International Postgraduate Open University |Degrees|     |Study blocks|     |Courses|

Course´s person responsible

Pasi Kallio

Implementations

	Lecture times and places	Target group recommended to
Implementation 1	Per 1, 2, 3 : Wednesday 14 - 16, SD302	3.-n. vuosikurssi Automaatio-, kone- ja materiaalitekniikan tiedekunta Automaatiotekniikan koulutusohjelma Biotekniikan koulutusohjelma KV-opiskelijat Sähkötekniikan koulutusohjelma Teknis-luonnontieteellinen koulutusohjelma Tietotekniikan koulutusohjelma Ympäristö- ja energiatekniikan koulutusohjelma

Requirements

Final examination and a seminar work (including an oral presentation and a written report).

Principles and baselines related to teaching and learning

-

Objectives

The objective of the course is to give an overview of microsystem technology and its applications. After the course, a student should be aware of the capabilities and state-of-the-art of MEMS and microsystem technology. The course suits especially well for students who aim for R&D tasks.

Content

Content	Core content	Complementary knowledge	Specialist knowledge
1.	Microfabrication: silicon micromachining, LIGA, bonding techniques	Microinjection molding, soft lithography, laser micromachining, micro electro-discharge machining, micro stereolithography	Packaging, interfacing, materials
2.	Scaling effect: basics of scaling, consequences in microrobotics and microfluidics, Trimmer's notation		Details of the forces dominant in the microscale
3.	Microsensors: pressure microsensors, microaccelerometers, micro gyrometers, chemical microsensors	Magnetic microsensors	Electric interfacing
4.	Microactuators and active actuator materials: piezoelectric actuators, shape memory materials, electrostatic actuators, performance measures of actuators	Magnetic microactuators, rheologic actuators	Thermomechanical microactuators, magnetic shape memory actuators, magnetic minimotors, electroactive polymers
5.	Applications: overview of application possibilities, microfluidics, microrobotics	Application examples

Evaluation criteria for the course

Examination 75 %; written part of the seminar work 25%.

Assessment scale:

Numerical evaluation scale (1-5) will be used on the course

Study material

Type	Name	Author	ISBN	URL	Edition, availability, ...	Examination material	Language
Lecture slides	Lecture slides on microsystems				Will be available in POP.		English
Summary of lectures	Introduction to Microsystem Technology	Pasi Kallio			Will be provided for copying in the beginning ofthe course.		English

Correspondence of content

More precise information per implementation

	Description	Methods of instruction	Implementation
Implementation 1	Here you can find information concerning the implementation of the course in 2008-2009.	Lectures Seminar work	Contact teaching: 0 % Distance learning: 0 % Self-directed learning: 0 %

Last modified	10.06.2008
Modifier	Pasi Kallio