Course Catalog 2009-2010
Postgraduate

Basic Pori International Postgraduate Open University

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Course Catalog 2009-2010

MIT-4056 Design of silicon sensors, 7 cr

Person responsible

Jukka Lekkala

Implementations

  Lecture times and places Target group recommended to
Implementation 1

Periods 4 4 - 5

 
International Students  


Requirements

Passed exercises and examination (7 cr) Optional exercise work (+ 1 cr)
Completion parts must belong to the same implementation

Principles and baselines related to teaching and learning

-

Learning outcomes

Gives readiness for the design, modeling and simulation of silicon microsensors.

Content

Content Core content Complementary knowledge Specialist knowledge
1. Micro and MEMS structures, design and modeling principles, modeling and simulation methods of sensors,  Comsol Multiphysics - modeling software   
2. Silicon as sensor material, manufacturing and processing methods of silicon sensors, film depositing methods, photolithography, wet and dry etching     
3. Lumped element model, energy methods, two-port theory, dynamical models, elastic structures   Theory of electromagnetic fields   
4. Electric, thermal and magnetic excitation, measurement methods, read-out eletronics, and noise.      
5. Examples of sensors, piezoresistive pressure sensor, capacitive acceleration sensor, piezoelectric gyroscope, resistive gas sensor     


Evaluation criteria for the course

Credit points of the course are determined by the points earned from examination and bonus from exercises. Passed exercise work +1 cr.

Assessment scale:

Numerical evaluation scale (1-5) will be used on the course

Partial passing:

Completion parts must belong to the same implementation

Study material

Type Name Author ISBN URL Edition, availability, ... Examination material Language
Book   Micromechanical Sensors   Miko Elwenspoek, et al   3540675825     Springer Verlag, 2001      English  
Book   Microsystem Design   Stephen D. Senturia   0-7923-7246-8     Kluwer Academic Publishers,      English  
Book   Modeling MEMS and NEMS   John A. Pelesko et al   3540675825     Springer Verlag, 2001      English  
Lecture slides   Design of Silicon Sensors   Jukka Lekkala       www.mit.tut.fi/MIT-4050/      English  


Prerequisites

Course Mandatory/Advisable Description
MIT-1016 Measurement Technology Advisable    
MIT-4016 Sensor Physics Advisable    
MIT-4036 Microsensors Advisable    

Additional information about prerequisites
Basics of the Matlab-program are required as prerequisite.

Prerequisite relations (Requires logging in to POP)

Correspondence of content

Course Corresponds course  Description 
MIT-4056 Design of silicon sensors, 7-8 cr MIT-4057 Design of Silicon Sensors, 8-9 cr  
MIT-4056 Design of silicon sensors, 7-8 cr MIT-4050 Design of Silicon Sensors, 7-8 cr  
MIT-4056 Design of silicon sensors, 7-8 cr ASE-3056 Design of Microsensors, 5 cr  

Additional information

Will be lectured in parallel with the course MIT-4050 in the same lecture room (SH108).

More precise information per implementation

  Description Methods of instruction Implementation
Implementation 1 Gives readiness for the designing, modeling and simulation of silicon microsensors.   Lectures
Excercises
Practical works
   
Contact teaching: 0 %
Distance learning: 0 %
Self-directed learning: 0 %  


Last modified09.03.2009
ModifierJukka Lekkala