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Course Catalog 2010-2011
ACI-51006 Introduction to Microsystem Technology, 4 cr |
Person responsible
Pasi Kallio
Lessons
| Study type | P1 | P2 | P3 | P4 | Summer | Implementations | Lecture times and places |
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Requirements
Final examination and a seminar work (including an oral presentation and a written report).
Principles and baselines related to teaching and learning
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Learning outcomes
After the course, the student is able to recognise microsystem technology and name its main applications. The student is also aware of the capabilities and state-of-the-art of microsensors and actuators. The student is able to identify different sensor and actuator principles, explain their working principles and name their benefits and drawbacks. The student can explain the principles of silicon micromachining, LIGA and different bonding techniques The course suits especially well for students who aim for R&D tasks.
Content
| Content | Core content | Complementary knowledge | Specialist knowledge |
| 1. | Microfabrication: silicon micromachining, LIGA, bonding techniques | Microinjection molding, soft lithography, laser micromachining, micro electro-discharge machining, micro stereolithography | Packaging, interfacing, materials |
| 2. | Scaling effect: basics of scaling, consequences in microrobotics and microfluidics, Trimmer's notation | Details of the forces dominant in the microscale | |
| 3. | Microsensors: pressure microsensors, microaccelerometers, micro gyrometers, chemical microsensors | Magnetic microsensors | Electric interfacing |
| 4. | Microactuators and active actuator materials: piezoelectric actuators, shape memory materials, electrostatic actuators, performance measures of actuators | Magnetic microactuators, rheologic actuators | Thermomechanical microactuators, magnetic shape memory actuators, magnetic minimotors, electroactive polymers |
| 5. | Applications: overview of application possibilities, microfluidics, microrobotics | Application examples |
Evaluation criteria for the course
Examination 75 %; written part of the seminar work 25%.
Assessment scale:
Numerical evaluation scale (1-5) will be used on the course
Study material
| Type | Name | Author | ISBN | URL | Edition, availability, ... | Examination material | Language |
| Lecture slides | Lecture slides on microsystems | Will be available in POP. | English | ||||
| Summary of lectures | Introduction to Microsystem Technology | Pasi Kallio | Will be provided for copying in the beginning ofthe course. | English |
Prerequisite relations (Requires logging in to POP)
Correspondence of content
| Course | Corresponds course | Description |
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Vastaavuus 1 = 1 |
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More precise information per implementation
| Implementation | Description | Methods of instruction | Implementation |
| Here you can find information concerning the implementation of the course in 2010-2011. | Lectures Excercises |
Contact teaching: 0 % Distance learning: 0 % Self-directed learning: 0 % |