Course Catalog 2010-2011
International

Basic Pori International Postgraduate Open University

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Course Catalog 2010-2011

ACI-51006 Introduction to Microsystem Technology, 4 cr

Person responsible

Pasi Kallio

Lessons

Study type P1 P2 P3 P4 Summer Implementations Lecture times and places
Lectures
Seminar
 2 h/week

+2 h/week


 10 h/per


 


 
ACI-51006 2010-01 Wednesday 14 - 16, SD302

Requirements

Final examination and a seminar work (including an oral presentation and a written report).

Principles and baselines related to teaching and learning

-

Learning outcomes

After the course, the student is able to recognise microsystem technology and name its main applications. The student is also aware of the capabilities and state-of-the-art of microsensors and actuators. The student is able to identify different sensor and actuator principles, explain their working principles and name their benefits and drawbacks. The student can explain the principles of silicon micromachining, LIGA and different bonding techniques The course suits especially well for students who aim for R&D tasks.

Content

Content Core content Complementary knowledge Specialist knowledge
1. Microfabrication: silicon micromachining, LIGA, bonding techniques  Microinjection molding, soft lithography, laser micromachining, micro electro-discharge machining, micro stereolithography  Packaging, interfacing, materials 
2. Scaling effect: basics of scaling, consequences in microrobotics and microfluidics, Trimmer's notation    Details of the forces dominant in the microscale 
3. Microsensors: pressure microsensors, microaccelerometers, micro gyrometers, chemical microsensors  Magnetic microsensors  Electric interfacing 
4. Microactuators and active actuator materials: piezoelectric actuators, shape memory materials, electrostatic actuators, performance measures of actuators  Magnetic microactuators, rheologic actuators  Thermomechanical microactuators, magnetic shape memory actuators, magnetic minimotors, electroactive polymers 
5. Applications: overview of application possibilities, microfluidics, microrobotics  Application examples   

Evaluation criteria for the course

Examination 75 %; written part of the seminar work 25%.

Assessment scale:

Numerical evaluation scale (1-5) will be used on the course

Study material

Type Name Author ISBN URL Edition, availability, ... Examination material Language
Lecture slides   Lecture slides on microsystems         Will be available in POP.      English  
Summary of lectures   Introduction to Microsystem Technology   Pasi Kallio       Will be provided for copying in the beginning ofthe course.      English  

Prerequisite relations (Requires logging in to POP)



Correspondence of content

Course Corresponds course  Description 
ACI-51006 Introduction to Microsystem Technology, 4 cr ACI-51000 Introduction to Microsystem Technology, 4 cr Vastaavuus 1 = 1  
ACI-51006 Introduction to Microsystem Technology, 4 cr 76527 Introduction to Microsystem Technology, 3 cu  

More precise information per implementation

Implementation Description Methods of instruction Implementation
ACI-51006 2010-01 Here you can find information concerning the implementation of the course in 2010-2011.   Lectures
Excercises
   
Contact teaching: 0 %
Distance learning: 0 %
Self-directed learning: 0 %  

Last modified26.02.2010