Course Catalog 2010-2011
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Basic Pori International Postgraduate Open University

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Course Catalog 2010-2011

ASE-3056 Design of Microsensors, 5 cr

Person responsible

Jukka Lekkala

Requirements

Passed exercises, laboratory works and examination.
Completion parts must belong to the same implementation

Learning outcomes

After having passed the study module the student will understand the designing and modelling principles of micro and MEMS sensors. He/she knows the manufacturing methods and processes of micro sensors in general terms and can use this information in the designing. He/she knows the most general modelling ways and can adapt them. He/she can use the different modelling and simulation programs. The student can list the examples of the different micro computer sensors, their designing principles and of application areas.

Content

Content Core content Complementary knowledge Specialist knowledge
1. Micro and MEMS structures, design and modeling principles, modeling and simulation methods of sensors   Comsol Multiphysics - modeling software    
2. Silicon and quartz as sensor materials, special cases of manufacturing and processing methods   Film depositing methods, dry etching   
3. Lumped element model, energy methods, two-port theory, dynamical models, elastic structures   Theory of electromagnetic fields   FEM modeling 
4. Electric, thermal and magnetic excitation, measurement methods, read-out eletronics, and noise.   Low-noise electronics, pahase-sensitive methods   
5. Examples of sensors, piezoresistive pressure sensor, capacitive acceleration sensor, piezoelectric gyroscope, resistive gas sensor     

Evaluation criteria for the course

The grade of the course is determined by examination. If the student knows the core material well, there is a possibility to pass the course with grade 3. The supplementing knowledge must be also known in order to reach a grade of 4 or 5. If in the core material there are minor shortcomings, the student will have an opportunity for the grade 1 or 2 depending on the amount of the shortcomings. Activity in exercises gives the opportunity for the additional points in the examination. If there are considerable shortcomings in the knowledge of the core material, the student will not pass the course.

Assessment scale:

Numerical evaluation scale (1-5) will be used on the course

Partial passing:

Completion parts must belong to the same implementation

Study material

Type Name Author ISBN URL Edition, availability, ... Examination material Language
Book   Microsystem Design   Stephen D. Senturia   0-7923-7246-8          English  
Lecture slides   Design of Microsensors   Jukka Lekkala            English  

Prerequisite relations (Requires logging in to POP)



Correspondence of content

Course Corresponds course  Description 
ASE-3056 Design of Microsensors, 5 cr MIT-4056 Design of silicon sensors, 7-8 cr  
ASE-3056 Design of Microsensors, 5 cr MIT-4050 Design of Silicon Sensors, 7-8 cr  

Additional information

Suitable for postgraduate studies
Will not be lectured year 2010-2011

Last modified25.02.2010