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Course Catalog 2011-2012
MIT-4057 Design of Silicon Sensors, 8-9 cr |
Additional information
Will be lectured in parallel with the course MIT-4051 in the same lecture room (SH108).
Suitable for postgraduate studies
Person responsible
Jukka Lekkala
Lessons
| Study type | P1 | P2 | P3 | P4 | Summer | Implementations | Lecture times and places |
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Requirements
Passed exercises, laboratory works and examination (8 cr)
Optional exercise work (+ 1 cr)
Completion parts must belong to the same implementation
Learning outcomes
After having passed the study module the student will understand the designing and modelling principles of micro and MEMS sensors. He/she knows the manufacturing methods and processes of micro sensors in general terms and can use this information in the designing. He/she knows the most general modelling ways and can adapt them. He/she can use the different modelling and simulation programs. The student can list the examples of the different micro computer sensors, their designing principles and of application areas.
Content
| Content | Core content | Complementary knowledge | Specialist knowledge |
| 1. | Micro and MEMS structures, design and modeling principles, modeling and simulation methods of sensors | Comsol Multiphysics - modeling software | |
| 2. | Silicon as sensor material, manufacturing and processing methods of silicon sensors, film depositing methods, photolithography, wet and dry etching | ||
| 3. | Lumped element model, energy methods, two-port theory, dynamical models, elastic structures | Theory of electromagnetic fields | |
| 4. | Electric, thermal and magnetic excitation, measurement methods, read-out eletronics, and noise. | ||
| 5. | Examples of sensors, piezoresistive pressure sensor, capacitive acceleration sensor, piezoelectric gyroscope, resistive gas sensor |
Evaluation criteria for the course
The grade of the course is determined by examination. If the student knows the core material well, there is a possibility to pass the course with grade 3. The supplementing knowledge must be also known in order to reach a grade of 4 or 5. If in the core material there are minor shortcomings, the student will have an opportunity for the grade 1 or 2 depending on the amount of the shortcomings. Activity in exercises gives the opportunity for the additional points in the examination. If there are considerable shortcomings in the knowledge of the core material, the student will not pass the course.
Assessment scale:
Numerical evaluation scale (1-5) will be used on the course
Partial passing:
Study material
| Type | Name | Author | ISBN | URL | Edition, availability, ... | Examination material | Language |
| Book | Micromechanical Sensors | Miko Elwenspoek, et al | 3540675825 | Springer Verlag, 2001 | English | ||
| Book | Microsystem Design | Stephen D. Senturia | 0-7923-7246-8 | Kluwer Academic Publishers, 2001 | English | ||
| Book | Modeling MEMS and NEMS | John A. Pelesko et al | 3540675825 | Springer Verlag, 2001 | English | ||
| Lecture slides | Design of Silicon Sensors | Jukka Lekkala | English |
Prerequisites
| Course | Mandatory/Advisable | Description |
| MIT-4016 Sensor Physics | Advisable | |
| MIT-4037 Microsensors | Advisable |
Prerequisite relations (Requires logging in to POP)
Correspondence of content
| Course | Corresponds course | Description |
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More precise information per implementation
| Implementation | Description | Methods of instruction | Implementation |
| Gives readiness for the designing, modeling and simulation of silicon microsensors. |