Course Catalog 2012-2013
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Basic Pori International Postgraduate Open University

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Course Catalog 2012-2013

MIT-4057 Design of Silicon Sensors, 8-9 cr

Additional information

Suitable for postgraduate studies

Person responsible

Jukka Lekkala

Lessons

Study type P1 P2 P3 P4 Summer Implementations Lecture times and places
Lectures
Excercises
Assignment
Laboratory work




 




 
 3 h/week
 2 h/week

 3 h/per
+2 h/week
+3 h/week
 12 h/per
+3 h/per




 
MIT-4057 2012-01 Friday 9 - 12, SH108

Requirements

Passed exercises, laboratory works and examination (8 cr) Optional exercise work (+ 1 cr)
Completion parts must belong to the same implementation

Learning outcomes

After having passed the study module the student will understand the designing and modelling principles of micro and MEMS sensors. He/she knows the manufacturing methods and processes of micro sensors in general terms and can use this information in the designing. He/she knows the most general modelling ways and can adapt them. He/she can use the different modelling and simulation programs. The student can list the examples of the different micro computer sensors, their designing principles and of application areas.

Content

Content Core content Complementary knowledge Specialist knowledge
1. Micro and MEMS structures, design and modeling principles, modeling and simulation methods of sensors   Comsol Multiphysics - modeling software    
2. Silicon as sensor material, manufacturing and processing methods of silicon sensors, film depositing methods, photolithography, wet and dry etching      
3. Lumped element model, energy methods, two-port theory, dynamical models, elastic structures   Theory of electromagnetic fields    
4. Electric, thermal and magnetic excitation, measurement methods, read-out eletronics, and noise.      
5. Examples of sensors, piezoresistive pressure sensor, capacitive acceleration sensor, piezoelectric gyroscope, resistive gas sensor      

Evaluation criteria for the course

The grade of the course is determined by examination. If the student knows the core material well, there is a possibility to pass the course with grade 3. The supplementing knowledge must be also known in order to reach a grade of 4 or 5. If in the core material there are minor shortcomings, the student will have an opportunity for the grade 1 or 2 depending on the amount of the shortcomings. Activity in exercises gives the opportunity for the additional points in the examination. If there are considerable shortcomings in the knowledge of the core material, the student will not pass the course.

Assessment scale:

Numerical evaluation scale (1-5) will be used on the course

Partial passing:

Completion parts must belong to the same implementation

Study material

Type Name Author ISBN URL Edition, availability, ... Examination material Language
Book   Micromechanical Sensors   Miko Elwenspoek, et al   3540675825     Springer Verlag, 2001      English  
Book   Microsystem Design   Stephen D. Senturia   0-7923-7246-8     Kluwer Academic Publishers, 2001      English  
Book   Modeling MEMS and NEMS   John A. Pelesko et al   3540675825     Springer Verlag, 2001      English  
Lecture slides   Design of Silicon Sensors   Jukka Lekkala            English  

Prerequisites

Course Mandatory/Advisable Description
MIT-4016 Sensor Physics Advisable    
MIT-4037 Microsensors Advisable    

Prerequisite relations (Requires logging in to POP)



Correspondence of content

Course Corresponds course  Description 
MIT-4057 Design of Silicon Sensors, 8-9 cr MIT-4056 Design of silicon sensors, 7-8 cr  

More precise information per implementation

Implementation Description Methods of instruction Implementation
MIT-4057 2012-01 Gives readiness for the designing, modeling and simulation of silicon microsensors.        

Last modified21.12.2012