Microsensors, 5 cr

Core content

• Principles and classification of sensors, different signal energies, integrated sensors, design principles of microsensors.
• Overview on microsensor fabrication techniques
• Temperature sensors, Seebeck's phenomenon in metals and semiconductors, thermistors, diode and transistor as temperature sensor, radiation sensors, photoresistor, photodiode, pyroelectric sensors, pressure sensors.
• Inertia sensors, acceleration sensors, gyro, flow sensors, magnetic sensors (Hall-sensor, magneto-resistive sensor), chemical sensors, ioniselective sensors, gas sensors, microelectrodes
  
• Applications of microsensors, examples of commercial sensors.
• Reporting the experimental results in scientific format
  

Complementary knowledge

• Physical and chemical phenomena in solid materials, origin of noise and different noise types.
• Components of microelectronics (diode, transistor, FET).
• Interaction of radiation with materia.
• Packaging methods of microelectronics.
• Modelling and simulation of sensors
• Limitations of numerical modelling