Microsensors, 5 cr

Tampere University

Teaching periods

Course code

BBT.MND.701

Language of instruction

English

Academic years

2024–2025, 2025–2026, 2026–2027

Level of study

Advanced studies

Grading scale

General scale, 0-5

Persons responsible

Responsible teacher:

Antti Vehkaoja

Responsible teacher:

Mikko Peltokangas

Responsible organisation

Faculty of Medicine and Health Technology 100 %

Coordinating organisation

MET Studies 100 %

Common learning outcomes

International outlook and global responsibility

Principles and classification of sensors, different signal energies, integrated sensors, design principles of microsensors.
Overview on microsensor fabrication techniques
Temperature sensors, Seebeck's phenomenon in metals and semiconductors, thermistors, diode and transistor as temperature sensor, radiation sensors, photoresistor, photodiode, pyroelectric sensors, pressure sensors.
Inertia sensors, acceleration sensors, gyro, flow sensors, magnetic sensors (Hall-sensor, magneto-resistive sensor), chemical sensors, ioniselective sensors, gas sensors, microelectrodes
Applications of microsensors, examples of commercial sensors.
Reporting the experimental results in scientific format

Physical and chemical phenomena in solid materials, origin of noise and different noise types.
Components of microelectronics (diode, transistor, FET).
Interaction of radiation with materia.
Packaging methods of microelectronics.
Modelling and simulation of sensors
Limitations of numerical modelling

Learning outcomes

Recommended prerequisites

Further information

Learning material

Equivalences

Studies that include this course

Completion option 1

Passed exercises, laboratory works, seminar presentation, report and examination.

Completion of all options is required.