Course unit, curriculum year 2023–2024
BBT.031
Introduction to Microsystem Technology, 5 cr
Tampere University
- Description
- Completion options
Teaching periods
Active in period 1 (1.8.2023–22.10.2023)
Active in period 2 (23.10.2023–31.12.2023)
Active in period 3 (1.1.2024–3.3.2024)
Active in period 4 (4.3.2024–31.5.2024)
Course code
BBT.031Language of instruction
EnglishAcademic years
2021–2022, 2022–2023, 2023–2024Level of study
Intermediate studiesGrading scale
General scale, 0-5Persons responsible
Responsible teacher:
Pasi KallioResponsible teacher:
Jari VäliahoResponsible organisation
Faculty of Medicine and Health Technology 100 %
Coordinating organisation
MET Studies 100 %
Common learning outcomes
International outlook and global responsibility
Core content
- Definition of microsystem technology, understanding of the potential and challenges related to microsystem technology, ability to name the main applications.
- Definition of scaling effect, its origin and main effects at microscale.
- Microscopy, especially optical microscopy, scanning electron microscopy and atomic force microscopy, basic operating principles.
- Skills to operate in the clean room facilities under supervision.
- Microactuators, especially piezoelectric actuators, shape memory alloy actuators, thermal actuators and electrostatic actuators, basic operating principles.
- Microsensors, especially pressure, acceleration and flow sensors. Structure and basic operation principles.
Complementary knowledge
- Basic understanding of dimensional analysis and and its utilization in microsystem technology.
- Comparing benefits and limitations of different microscopy methods.
- Profilometers in characterization.
- Comparing the implementation and performance of different actuator types.
- Comparing the implementation and performance of different sensor types.
Specialist knowledge
- Analyse and compare the differencies in scaling between different physical phenomena.
- Selection of microscopy technique according to the application.
- Other characterization methods.
- Material-related phenomena of microactuators. Microrobotics as an application field of microactuators.
- Sensor fabrication techniques.
Learning outcomes
Prerequisites
Further information
Learning material
Equivalences
Studies that include this course
Completion option 1
Lectures and calculation exercise recommended. Visitation lectures gives bonus points. Obligatory: Lab exercise, Demo sessions, Seminar
Completion of all options is required.
Participation in teaching
29.08.2023 – 15.12.2023
Active in period 1 (1.8.2023–22.10.2023)
Active in period 2 (23.10.2023–31.12.2023)