Course unit, curriculum year 2023–2024
BBT.MND.701
Microsensors, 5 cr
Tampere University
- Description
- Completion options
Teaching periods
Active in period 1 (1.8.2023–22.10.2023)
Active in period 3 (1.1.2024–3.3.2024)
Active in period 4 (4.3.2024–31.5.2024)
Active in period 5 (1.6.2024–31.7.2024)
Course code
BBT.MND.701Language of instruction
EnglishAcademic years
2021–2022, 2022–2023, 2023–2024Level of study
Advanced studiesGrading scale
General scale, 0-5Persons responsible
Responsible teacher:
Antti VehkaojaResponsible teacher:
Mikko PeltokangasResponsible organisation
Faculty of Medicine and Health Technology 100 %
Coordinating organisation
MET Studies 100 %
Common learning outcomes
International outlook and global responsibility
Core content
- Principles and classification of sensors, different signal energies, integrated sensors, design principles of microsensors.
- Sensor materials, sensor fabrication technologies, thin and thick film manufacturing methods, silicon processing techniques, principles of photolithography, silicon micromechanics, encapsulation of microsensors.
- Temperature sensors, Seebeck's phenomenon in metals and semiconductors, thermistors, diode and transistor as temperature sensor, radiation sensors, photoresistor, photodiode, pyroelectric sensors, pressure sensors.
- Inertia sensors, acceleration sensors, gyro, flow sensors, magnetic sensors(Hall-sensor, magneto-resistive sensor), chemical sensors, ioniselective sensors, gas sensors.
- Eapplications of microsensors, examples of commercial sensors.
Complementary knowledge
- Physical and chemical phenomena in solid materials, origin of noise and different noise types.
- Lattice structure and properties of silicon, principles of the processing instruments, components of microelectronics (diode, transistor, FET).
- Interaction of radiation with materia.
- Microfluidistics.
- Packaging methods of microelectronics.
Specialist knowledge
- Modelling software (Comsol Multiphysics)
Learning outcomes
Recommended prerequisites
Further information
Learning material
Equivalences
Studies that include this course
Completion option 1
Passed exercises, laboratory works, seminar presentation, report and examination.
Completion of all options is required.
Participation in teaching
10.01.2024 – 29.04.2024
Active in period 3 (1.1.2024–3.3.2024)
Active in period 4 (4.3.2024–31.5.2024)