Course Catalog 2008-2009 International Basic Pori International Postgraduate Open University |Degrees|     |Study blocks|     |Courses|

Course´s person responsible

Jukka Lekkala

Implementations

	Lecture times and places	Target group recommended to
Implementation 1

Requirements

Passed exercises and examination (7 cr) Optional exercise work (+ 1 cr)
Completion parts must belong to the same implementation

Principles and baselines related to teaching and learning

-

Objectives

Gives readiness for the design, modeling and simulation of silicon microsensors.

Content

Content	Core content	Complementary knowledge	Specialist knowledge
1.	Micro and MEMS structures, design and modeling principles, modeling and simulation methods of sensors,	Comsol Multiphysics - modeling software
2.	Silicon as sensor material, manufacturing and processing methods of silicon sensors, film depositing methods, photolithography, wet and dry etching
3.	Lumped element model, energy methods, two-port theory, dynamical models, elastic structures	Theory of electromagnetic fields
4.	Electric, thermal and magnetic excitation, measurement methods, read-out eletronics, and noise.
5.	Examples of sensors, piezoresistive pressure sensor, capacitive acceleration sensor, piezoelectric gyroscope, resistive gas sensor

Evaluation criteria for the course

Credit points of the course are determined by the points earned from examination and bonus from exercises. Passed exercise work +1 cr.

Assessment scale:

Numerical evaluation scale (1-5) will be used on the course

Partial passing:

Completion parts must belong to the same implementation

Study material

Type	Name	Author	ISBN	URL	Edition, availability, ...	Examination material	Language
Book	Micromechanical Sensors	Miko Elwenspoek, et al	3540675825		Springer Verlag, 2001		English
Book	Microsystem Design	Stephen D. Senturia	0-7923-7246-8		Kluwer Academic Publishers,		English
Book	Modeling MEMS and NEMS	John A. Pelesko et al	3540675825		Springer Verlag, 2001		English
Lecture slides	Design of Silicon Sensors	Jukka Lekkala			www.mit.tut.fi/MIT-4050/		English

Prerequisites

Correspondence of content

Additional information

Will be lectured in parallel with the course MIT-4050.

More precise information per implementation

	Description	Methods of instruction	Implementation
Implementation 1	Gives readiness for the designing, modeling and simulation of silicon microsensors.	Lectures Excercises Practical works	Contact teaching: 0 % Distance learning: 0 % Self-directed learning: 0 %

Last modified	13.08.2008
Modifier	Heikki Jokinen