BMT-2316 Introduction to Microsystem Technology, 5 cr
Person responsible
Pasi Kallio
Lessons
| Implementation | Period | Person responsible | Requirements |
| BMT-2316 2019-01 | 1 - 2 |
Pasi Kallio Mariaana Savia Jari Väliaho |
Passing the final exam, exercises and seminar work (including an oral presentation/slides). |
Learning Outcomes
After the course, the student is able to: - define microsystem technology and name its main applications - identify different microscopy techniques, explain their working principles and name the benefits and drawbacks - define scaling effect, knows its consequences and how analyse its influences on different phenomena - name the most important microfabrication methods and know their strengths and limitations - name capabilities and state-of-the-art of selected microsensors, explain their working principles and name their benefits and drawbacks - name capabilities and state-of-the-art of microactuators, explain their working principles and name their benefits and drawbacks - give presentation in English - perform scientific literature search
Content
| Content | Core content | Complementary knowledge | Specialist knowledge |
| 1. | Definition of microsystem technology, understanding of the potential and challenges related to microsystem technology, ability to name the main applications. | ||
| 2. | Definition of scaling effect, its origin and main effects at microscale. | Basic understanding of dimensional analysis and and its utilization in microsystem technology. | Analyse and compare the differencies in scaling between different physical phenomena. |
| 3. | Microscopy, especially optical microscopy, scanning electron microscopy and atomic force microscopy, basic operating principles. | Comparing benefits and limitations of different microscopy methods. | Selection of microscopy technique according to the application. |
| 4. | Skills to operate in the clean room facilities under supervision. | Profilometers in characterization. | Other characterization methods. |
| 5. | Microactuators, especially piezoelectric actuators, shape memory alloy actuators, thermal actuators and electrostatic actuators, basic operating principles. | Comparing the implementation and performance of different actuator types. | Material-related phenomena of microactuators. Microrobotics as an application field of microactuators. |
| 6. | Microsensors, especially pressure, acceleration and flow sensors. Structure and basic operation principles. | Comparing the implementation and performance of different sensor types. | Sensor fabrication techniques. |
Instructions for students on how to achieve the learning outcomes
The grade of the course is determined by examination and seminar work. If the student knows the core material well, there is a possibility to pass the course with grade 3. The supplementing knowledge must be also known in order to reach a grade of 4 or 5. If in the core material there are minor shortcomings, the student will have an opportunity for the grade 1 or 2 depending on the amount of the shortcomings. If there are considerable shortcomings in the knowledge of the core material, the student will not pass the course.
Assessment scale:
Numerical evaluation scale (0-5)
Study material
| Type | Name | Author | ISBN | URL | Additional information | Examination material |
| Lecture slides | Lecture slides | Lecturers | Yes | |||
| Summary of lectures | Introduction to Microsystem Technology | Pasi Kallio et al | Yes |
Correspondence of content
| Course | Corresponds course | Description |
| BMT-2316 Introduction to Microsystem Technology, 5 cr | ASE-2316 Introduction to Microsystem Technology, 5 cr |